Mask Aligner with Nanoimprint Lithography

Contact

Engineer: Adem SARAÇ | E-mail: sarac@unam.bilkent.edu.tr or facility@nano.org.tr

Equipment Card

Make: EVG
Model: EVG620
Location: UNAM-Clean Room

Usage Fee And Notes

Usage Fee:

100 TL/hour (Tax Included)

Notes:

Accessories

5” Loading Frame, 5” Mask Holder, 4” Chuck, 4” Vacuum Contact Chuck, Small Wafer Chuck, Nanoimprint Lithography Chuck