Mask Aligner
Contact
Engineer: Adem SARAÇ | E-mail: sarac@unam.bilkent.edu.tr or facility@nano.org.tr
Equipment Card
Make: EVG
Model: EVG620
Location: UNAM-Clean Room
Usage Fee And Notes
Usage Fee:
50 TL/hour (Tax Included)
Notes:
Accessories
5” Loading Frame, 5” Mask Holder, 4” Chuck, 4” Vacuum Contact Chuck, Small Wafer Chucks
