Inductively Coupled Plasma(Si etching)
Contact
Engineer: Adem SARAÇ | E-mail: sarac@unam.bilkent.edu.tr or facility@nano.org.tr
Equipment Card
Make: STS
Model: LPX SR (Cl)
Location: UNAM-Clean Room
Usage Fee And Notes
Usage Fee:
50 TL/hour (Tax Included)
Notes:
Accessories
