E-Beam Lithography

Contact

Engineer: A. Koray MIZRAK| E-mail: mizrak@unam.bilkent.edu.tr or facility@nano.org.tr

Equipment Card

Make: FEI & Raith
Model: FEI Nova NanoSEM 600 + Raith ElphyPlus
Location: UNAM-BL12

Usage Fee And Notes

Usage Fee:

100 TL/hour (Tax Included)

Notes:

Accessories

SEM column, Pt GIS, Raith ElphyPlus, 150 mm piezo stage, LVD + STEM + BSE + ETD detectors